JPS628399U - - Google Patents
Info
- Publication number
- JPS628399U JPS628399U JP9998585U JP9998585U JPS628399U JP S628399 U JPS628399 U JP S628399U JP 9998585 U JP9998585 U JP 9998585U JP 9998585 U JP9998585 U JP 9998585U JP S628399 U JPS628399 U JP S628399U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- vibrator
- electrode
- vibrators
- around
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998585U JPS628399U (en]) | 1985-06-29 | 1985-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998585U JPS628399U (en]) | 1985-06-29 | 1985-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS628399U true JPS628399U (en]) | 1987-01-19 |
Family
ID=30969374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998585U Pending JPS628399U (en]) | 1985-06-29 | 1985-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628399U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008274932A (ja) * | 2007-04-03 | 2008-11-13 | Canon Inc | マイクロ流体デバイスを用いた送液装置および送液方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183100A (ja) * | 1983-03-31 | 1984-10-18 | Agency Of Ind Science & Technol | 超音波ポンプ |
-
1985
- 1985-06-29 JP JP9998585U patent/JPS628399U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183100A (ja) * | 1983-03-31 | 1984-10-18 | Agency Of Ind Science & Technol | 超音波ポンプ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008274932A (ja) * | 2007-04-03 | 2008-11-13 | Canon Inc | マイクロ流体デバイスを用いた送液装置および送液方法 |